Beam Slits

The motorized water cooled slits consist of ISO-K or CF flange on which the slits mechanism and the motorization are mounted. In vacuum, slits consist of a water cooled copper plate on which a tungsten plate is mounted to allow to intercept up to 1500 watts beam. The flange is equipped with special vacuum feed through for water circulation. On atmosphere side, the slits movement is ensured through two independent stepper motors and vacuum feed through which are mounted on the flange.